PAC, 1994, 66, 1667
(Thin films including layers: terminology in relation to their preparation and characterization (IUPAC Recommendations 1994))
on page 1674
Transformed and rewritten from PDF version (entry
http://www.iupac.org/goldbook/E01919.pdf)
by: Miloslav Nic, Jiri Jirat, Bedrich Kosata, ICT Prague, Czech Republic