electron probe X-ray microanalysis (EPXMA)

Any analytical technique which uses the excitation and evaluation of the characteristic X-ray spectrum of a solid specimen by a focused electron beam (typically of a diameter of less than ). Qualitative and quantitative X-ray analysis is the main feature of EPXMA. For obtaining supplementary information the secondary, back scattered and absorbed electrons are also frequently observed. Qualitative and quantitative X-ray analysis is, however, the main feature of EPXMA.