Any technique using low energy
(
) ions in which the bombarding particles scattered by the sample are detected and recorded as a function of energy and/or
angle. This technique is used mainly for determining the composition and structure of the first few atomic layers of a sample.
Source:
PAC, 1979, 51, 2243
(General aspects of trace analytical methods - IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques)
on page 2246
Cite as:
IUPAC. Compendium of Chemical Terminology, 2nd ed. (the "Gold Book"). Compiled by A. D. McNaught and A. Wilkinson. Blackwell Scientific Publications, Oxford (1997). XML on-line corrected version: http://goldbook.iupac.org (2006-) created by M. Nic, J. Jirat, B. Kosata; updates compiled by A. Jenkins. ISBN 0-9678550-9-8.
doi:10.1351/goldbook.
