A
film whose boundaries are represented by ideal parallel planes. The planar
film thickness is defined as the distance between these planes. The terms nanometre
thick film, micrometre
thick film and millimetre
thick film refer specifically to
film thickness in the ranges
-
,
-
and
-
,
respectively.
Source:
PAC, 1994, 66, 1667
(Thin films including layers: terminology in relation to their preparation and characterization (IUPAC Recommendations 1994))
on page 1671
Cite as:
IUPAC. Compendium of Chemical Terminology, 2nd ed. (the "Gold Book"). Compiled by A. D. McNaught and A.Wilkinson. Blackwell Scientific Publications, Oxford (1997). XML on-line corrected version: http://goldbook.iupac.org (2006-) created by M. Nic, J. Jirat, B. Kosata; updates compiled by A. Jenkins. ISBN 0-9678550-9-8.
doi:10.1351/goldbook.
