IUPAC > Gold Book > alphabetical index > S > scanning electron microscopy (SEM)
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scanning electron microscopy (SEM)

Any analytical technique which involves the generation and evaluation of secondary electrons (and to a lesser extent back scattered electrons) by a finely focused electron beam (typically 10 nm or less) for high resolution and high depth of field imaging.
Source:
PAC, 1983, 55, 2023 (Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)) on page 2024
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Cite as:
IUPAC. Compendium of Chemical Terminology, 2nd ed. (the "Gold Book"). Compiled by A. D. McNaught and A. Wilkinson. Blackwell Scientific Publications, Oxford (1997). XML on-line corrected version: http://goldbook.iupac.org (2006-) created by M. Nic, J. Jirat, B. Kosata; updates compiled by A. Jenkins. ISBN 0-9678550-9-8. doi:10.1351/goldbook.
Last update: 2014-02-24; version: 2.3.3.
DOI of this term: doi:10.1351/goldbook.S05484.
Original PDF version: http://www.iupac.org/goldbook/S05484.pdf. The PDF version is out of date and is provided for reference purposes only. For some entries, the PDF version may be unavailable.
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