A special TEM-technique in which an electron transparent sample is bombarded with a finely focused electron beam (typically of a diameter of less than 10 nm) which can be scanned across the specimen or rocked across the optical axis and transmitted, secondary, back scattered and diffracted electrons as well as the characteristic X-ray spectrum can be observed. STEM essentially provides high resolution imaging of the inner microstructure and the surface of a thin sample (or small particles), as well as the possibility of chemical and structural characterization of micrometer and sub-micrometer domains through evaluation of the X-ray spectra and the electron diffraction pattern.