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electron probe X-ray microanalysis (EPXMA)

Any analytical technique which uses the excitation and evaluation of the characteristic X-ray spectrum of a solid specimen by a focused electron beam (typically of a diameter of less than 1 µm). Qualitative and quantitative X-ray analysis is the main feature of EPXMA. For obtaining supplementary information the secondary, back scattered and absorbed electrons are also frequently observed. Qualitative and quantitative X-ray analysis is, however, the main feature of EPXMA.
PAC, 1983, 55, 2023 (Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)) on page 2024
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IUPAC. Compendium of Chemical Terminology, 2nd ed. (the "Gold Book"). Compiled by A. D. McNaught and A. Wilkinson. Blackwell Scientific Publications, Oxford (1997). XML on-line corrected version: (2006-) created by M. Nic, J. Jirat, B. Kosata; updates compiled by A. Jenkins. ISBN 0-9678550-9-8.
Last update: 2014-02-24; version: 2.3.3.
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