Any technique using low energy
ions in which the bombarding particles scattered by the sample are detected and recorded
as a function of energy and/or angle
. This technique is used mainly for determining the composition and structure of the
first few atomic layers of a sample.
PAC, 1979, 51, 2243
(General aspects of trace analytical methods - IV. Recommendations for nomenclature,
standard procedures and reporting of experimental data for surface analysis techniques)
on page 2246
IUPAC. Compendium of Chemical Terminology, 2nd ed. (the "Gold Book"). Compiled by
A. D. McNaught and A. Wilkinson. Blackwell Scientific Publications, Oxford (1997).
XML on-line corrected version: http://goldbook.iupac.org (2006-) created by M. Nic,
J. Jirat, B. Kosata; updates compiled by A. Jenkins. ISBN 0-9678550-9-8. https://doi.org/10.1351/goldbook