A special TEM
-technique in which an electron transparent sample is bombarded with a finely focused
electron beam (typically of a diameter of less than 10 nm) which can be scanned across
the specimen or rocked across the optical axis and transmitted, secondary, back scattered
and diffracted electrons as well as the characteristic X-ray spectrum can be observed.
essentially provides high resolution imaging of the inner microstructure and the
surface of a thin sample (or small particles), as well as the possibility of chemical
and structural characterization of micrometer and sub-micrometer domains through evaluation
of the X-ray spectra and the electron diffraction
PAC, 1983, 55, 2023
(Nomenclature, symbols and units recommended for in situ microanalysis (Provisional))
on page 2025
IUPAC. Compendium of Chemical Terminology, 2nd ed. (the "Gold Book"). Compiled by
A. D. McNaught and A. Wilkinson. Blackwell Scientific Publications, Oxford (1997).
XML on-line corrected version: http://goldbook.iupac.org (2006-) created by M. Nic,
J. Jirat, B. Kosata; updates compiled by A. Jenkins. ISBN 0-9678550-9-8. https://doi.org/10.1351/goldbook