Rutherford backscattering (RBS)

Synonym: backscattering spectroscopy

Any technique using high energy particles directed toward a sample, in which the bombarding particles are detected and recorded as function of energy and/or angle. The technique is mostly used for determining depth distributions of elements based on the energy of the backscattered particle. In general, He+ or H+ particles are used at energies in the order of 100 keV to some MeV. Also referred to as backscattering spectrometry (BSS).
PAC, 1979, 51, 2243 (General aspects of trace analytical methods - IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques) on page 2246