Entries from:

PAC, 1979, 51, 2243. General aspects of trace analytical methods - IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques, doi:10.1351/pac197951112243

Auger electron yield
chemical shift in photoelectron and Auger spectra
clean surface
concentration in experimental surface (or surface concentration)
depth profile
depth resolution
detection limit
escape depth (for surface analysis techniques)
ion probe microanalysis (IPMA)
ion scattering spectrometry (ISS)
matrix effect
photoelectron yield
qualitative elemental specificity in analysis
relative detection limit
Rutherford backscattering (RBS)
sputtering
sputter yield
surface
surface contamination in surface analysis
surface coverage,
trace element