reflection high energy electron diffraction (RHEED)

Any technique which measures the angular intensity distribution of electrons 'reflected' from a crystalline surface under bombardment with high energy electrons near grazing incidence. The diffraction pattern provides very surface sensitive information (information depth 1 nm) on the atomic arrangement of the top layers of a solid.
PAC, 1983, 55, 2023 (Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)) on page 2025