Any technique using low energy (10 keV) ions in which the bombarding particles scattered by the sample are detected and recorded as a function of energy and/or angle. This technique is used mainly for determining the composition and structure of the first few atomic layers of a sample.
Source:
PAC, 1979, 51, 2243. 'General aspects of trace analytical methods—IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques' on page 2246 (https://doi.org/10.1351/pac197951112243)