A photoimaging material, generally applied as a thin film, whose local solubility properties can be altered photochemically. A subsequent development step produces an image which is useful for the fabrication of microelectronic devices (e.g. integrated circuits).
PAC, 1996, 68, 2223. 'Glossary of terms used in photochemistry (IUPAC Recommendations 1996)' on page 2265 (