scanning electron microscopy (SEM)
Any analytical technique which involves the generation and evaluation of secondary electrons (and to a lesser extent back scattered electrons) by a finely focused electron beam (typically 10 nm or less) for high resolution and high depth of field imaging.
PAC, 1983, 55, 2023. 'Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)' on page 2024 (