Auger electron spectroscopy
Any technique in which a specimen is bombarded with \(\mathrm{keV}\)-energy electrons or X-rays, and the energy distribution of the electrons produced through radiationless de-excitation of the atoms in the sample (@A00521@) is recorded. The derivative curve may also be recorded.
PAC, 1983, 55, 2023. (Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)) on page 2025 [Terms] [Paper]