depth resolution
The distance between the 84 and 16 per cent levels of the @D01606@ of an element in a perfect sandwich sample with an infinitesimally small overlap of the components. These limits correspond to the 2\(\sigma \)-value of the Gaussian distribution of the signal at the @I03082@.
PAC, 1979, 51, 2243. (General aspects of trace analytical methods—IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques) on page 2247 [Terms] [Paper]