depth resolution

https://doi.org/10.1351/goldbook.D01607
The distance between the 84 and 16 per cent levels of the @D01606@ of an element in a perfect sandwich sample with an infinitesimally small overlap of the components. These limits correspond to the 2\(\sigma \)-value of the Gaussian distribution of the signal at the @I03082@.
Source:
PAC, 1979, 51, 2243. (General aspects of trace analytical methods—IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques) on page 2247 [Terms] [Paper]
Cite as: IUPAC. Compendium of Chemical Terminology, 2nd ed. (the "Gold Book"). Compiled by A. D. McNaught and A. Wilkinson. Blackwell Scientific Publications, Oxford (1997). Online version (2019-) created by S. J. Chalk. ISBN 0-9678550-9-8. https://doi.org/10.1351/goldbook.
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Last revised: October 7, 2008