Any analytical technique which uses the excitation and evaluation of the characteristic X-ray spectrum of a solid specimen by a focused electron beam (typically of a diameter of less than \(1\ \unicode[Times]{x3BC}\text{m}\)). Qualitative and quantitative X-ray analysis is the main feature of EPXMA. For obtaining supplementary information the @[email protected], @[email protected] and @[email protected] are also frequently observed. Qualitative and quantitative X-ray analysis is, however, the main feature of EPXMA.