@[email protected] carbon (DLC) films are hard, amorphous films with a significant fraction of \(\mathrm{sp}^{3}\)-hybridized carbon atoms and which can contain a significant amount of hydrogen. Depending on the deposition conditions, these films can be fully amorphous or contain @[email protected] crystallites. These materials are not called @[email protected] unless a full three-dimensional crystalline lattice of @[email protected] is proven.
@[email protected] films without hydrogen can be prepared by carbon ion beam deposition, ion-assisted @[email protected] from @[email protected] or by @[email protected] ablation of @[email protected] @[email protected] carbon films containing significant contents of hydrogen are prepared by chemical vapour deposition. The hydrogen content is usually over 25 atomic %. The deposition parameters are (low) total pressure, hydrogen @[email protected], precursor molecules and plasma @[email protected] The plasma @[email protected] can be radio frequency, microwave or Ar+ ions. High @[email protected] favours amorphous films while high atomic hydrogen contents favour @[email protected] crystallite formation. Because of the confusion about structure engendered by the term @[email protected] carbon films, the term @[email protected] films has been suggested as a synonym.
PAC, 1995, 67, 473. (Recommended terminology for the description of carbon as a solid (IUPAC Recommendations 1995)) on page 487 [Terms] [Paper]