https://doi.org/10.1351/goldbook.I03060
Any technique which utilizes the @[email protected] of X-rays generated in a microstructural domain of a solid under bombardment with a finely focused electron beam, thus providing an X-ray @[email protected] pattern of this microstructural domain. The pattern can be recorded with a @[email protected] either on the reflection or @[email protected] side of the specimen (in the latter case the crystalline sample has to be a @[email protected] or a small particle).