ionization by sputtering

https://doi.org/10.1351/goldbook.I03189
@[email protected] by bombardment of a solid specimen with accelerated ions or electrons or fast neutrals.
Source:
Orange Book, 2nd ed., p. 204 [Terms] [Book]
Cite as: IUPAC. Compendium of Chemical Terminology, 2nd ed. (the "Gold Book"). Compiled by A. D. McNaught and A. Wilkinson. Blackwell Scientific Publications, Oxford (1997). Online version (2019-) created by S. J. Chalk. ISBN 0-9678550-9-8. https://doi.org/10.1351/goldbook.
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