@I03183@ by bombardment of a solid specimen with accelerated ions or electrons or fast neutrals.
Source: Orange Book, 2nd ed., p. 204 [Terms] [Book]
Citation: 'ionization by sputtering' in IUPAC Compendium of Chemical Terminology, 3rd ed. International Union of Pure and Applied Chemistry; 2006. Online version 3.0.1, 2019. https://doi.org/10.1351/goldbook.I03189 RISBibTexEndNote