ion scattering spectrometry (ISS)

https://doi.org/10.1351/goldbook.I03243
Any technique using low energy (\(10\ \text{keV}\)) ions in which the bombarding particles scattered by the sample are detected and recorded as a function of energy and/or @[email protected] This technique is used mainly for determining the composition and structure of the first few atomic layers of a sample.
Source:
PAC, 1979, 51, 2243. (General aspects of trace analytical methods—IV. Recommendations for nomenclature, standard procedures and reporting of experimental data for surface analysis techniques) on page 2246 [Terms] [Paper]