scanning electron microscopy (SEM)
Any analytical technique which involves the generation and evaluation of @[email protected] (and to a lesser extent @[email protected]) by a finely focused electron beam (typically \(10\ \text{nm}\) or less) for high resolution and high depth of field imaging.
PAC, 1983, 55, 2023. (Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)) on page 2024 [Terms] [Paper]