scanning electron microscopy (SEM)
Any analytical technique which involves the generation and evaluation of @S05518@ (and to a lesser extent @B00583@) by a finely focused electron beam (typically \(10\ \text{nm}\) or less) for high resolution and high depth of field imaging.
PAC, 1983, 55, 2023. (Nomenclature, symbols and units recommended for in situ microanalysis (Provisional)) on page 2024 [Terms] [Paper]